LED Wafer Heating Lamp Panel
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LED Wafer Heating Lamp Panel

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Product Description

1


Introduction

The LED Heating Lamp Panel is a high-efficiency heating device specifically designed for semiconductor wafer drying. It combines LED technology with optical radiative heat conduction performance, offering a uniform, precise, and controllable heating platform.


Product Features

Uniform Heating: The LED lamp heating plate consists of 88 channels with a total of 1,392 LED chips, and each LED chip can be individually controlled, ensuring uniformity in wafer temperature.


High Precision: Each LED chip utilizes PWM (Pulse Width Modulation) control, enabling precise temperature control.


Durability: LED radiation heating is more durable compared to traditional heating methods, resulting in a longer lifespan.


Cleanliness: Optical radiation has no pollution source, ensuring a high level of cleanliness.


Energy Efficiency: LED technology is more energy-efficient compared to traditional heating methods.


Quick Response: LED technology allows for rapid temperature adjustment and control.





Lamp Bead Specifications

  • 4040 Lamp Bead

  • Dimension: 4.0*4.0MM

  • Thickness: 1.0-1.05mm, with a flat silicone surface

  • Power: 10 watts

  • Voltage Range: 11-12.5 volts

  • Current Range: 700-900 milliamperes

  • Material: Silver-coated aluminum nitride ceramic substrate

  • Color Temperature: 6000-6500 Kelvin, manufactured using a high-brightness white light process


Control Panel

  • Individual control for brightness adjustment and power on/off functionality for each lamp bead within every ring

  • Equipped with three temperature sensors for monitoring the water cooling plate temperature

  • Each ring equipped with a thermistor for over-temperature protection

  • Total thickness of the control board designed to be under 15 millimeters

  • Communication established via a 485 communication protocol

  • Power supply sourced from a dedicated DC 200V power supply

  • Control board diameter: 290 millimeters, mounted on the rear side of the water cooling plate

  • Provision of the DC power supply is the responsibility of the customer


Quantity of Lamp Beads

  • Number of lamp bead loops: 20 loops, distributed in a concentric circular pattern

  • Quantity of lamp beads: 1392 units

  • Total lamp bead strings: 87 strings, with each string consisting of 16 lamp beads

  • Lamp panel diameter: 290 millimeters

  • Distribution of lamp beads within the lamp panel as per provided details


Water Cooling Plate Section

  • Diameter: 290 millimeters

  • Thickness: 8mm

  • Material: Aluminum

  • Features: Equipped with inlet and outlet water pipes as well as fixed brackets. Structural dimensions need to be provided by the customers.


Lamp Protection Features
  • Automatic shutdown in case of RS485 communication failure or MCU board malfunction

  • Automatic shutdown in case of water overheating within the cooling plate

  • Automatic shutdown of overheated lamp beads

  • Activation of alarm output signal in case of non-illumination and no current flow in a lamp bead


Factory Requirement

  • Cool Water Temperature: 8-12°C

  • Flow Rate: Greater than 10 Liters per Minute



After-Sales Services and Technical Support

  • Warranty Period: 1 year

  • Free replacement for quality-related issues during the warranty period

  • Paid spare parts, consumables, and technical support provided after the warranty period

  • Lamp panel replacement offered; on-site repairs not conducted




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    Add : No. 6, Yintai South Road, Shu'an, Humen Town, Dongguan City, Guangdong Province
    E-mail : sales02@pcb-yiquan.com.cn
   Tel : +86-769-82885420

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