Product Detail

Single-Tank Quartz Inline Heater

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Product Description

Introduction

The Quartz Inline Heater, a semiconductor high-purity heater, is crafted using high-quality halogen heating components and high-purity American GE quartz. Designed to handle chemicals compatible with quartz, it ensures optimal performance and reliability. Compact and highly thermally efficient, it is an auto-thermostatic, energy-saving, and safe heating solution.

Equipped with dry burn protection, it comes standard with a PT100 temperature sensor (configurable with K, J, or other temperature sensors as required) and an optional leakage detection sensor, enhancing both safety and performance.

Key Applications

Wafer Cleaning - In cleaning stages where precise temperature control is necessary to remove contaminants without damaging the wafer.
Chemical and Solvent Heating - During chemical processing steps, such as etching and developing, where accurate temperature control of chemicals is critical.
Photoresist Baking - In the photolithography process, where wafers need to be baked to cure the photoresist layer. Its precise temperature control is essential for maintaining the integrity of the patterns.
Post-Etching and Developing Processes - For heating solutions used in post-etching rinse and developing stages to ensure complete removal of residues.
Rapid Thermal Processing (RTP) - To provide quick, uniform heating in RTP steps, where precise temperature control is required to modify the physical properties of the silicon wafers.
Wet Thermal Oxidation - In processes that require controlled heating of solutions for thermal oxidation of wafers.
Other Applications: Single-Tank Quartz Inline Heater is also extensively used in other industries, including medical, pharmaceutical, chemical, laboratory and analytical instrumentation, microelectronics and nanotechnology, and the power sector, to meet the high standard requirements for purity and precise temperature control.

Details of Single-Tank Quartz Inline Heater

Product Name	Single-Tank Quartz Inline Heater
Heating Element	Halogen Lamp Tube
Material in Contact with Chemicals	High-Purity American GE Quartz Material, Interface with High-Purity PFA Adapters
Exterior Panel Material	Röchling Flame-Retardant PVC Panel
Performance Parameters	Voltage: 200-380V 50/60Hz Single/Three-Phase
Performance Parameters	Power: 4.5kw - 9kw
Temperature Range	25-180℃
Inlet/Outlet Interface	3/4' Inlet Bead

Features of the Quartz Online Heater

1. Cleanliness

Utilizes indirect heating method.

2. High Purity

The tank is made of high-purity quartz material from American GE.

3.Corrosion Resistance

All materials in contact with the chemical solution are PFA pipelines/high-purity quartz tanks.

4.Compact

Designed for direct installation on the pipeline to meet the minimal installation space requirements.

5.Safety

The casing material is PVC with FM fireproof certification from the brand Röchling.

Product Specifications Chart

Model	Voltage	Power	Rated Current	Exterior Dimensions
KRT-H-ZSD-3P208-4.5K-A	200-208V(AC 3φ)50/60 HZ	4.5kw	12-12.5A	(L)470mm(W)190mm(H)200mm
KRT-H-ZSD-1P220-4.5K-A	200-240V(AC 1φ)50/60 HZ	4.5kw	17.2-18.8A	(L)470mm(W)190mm(H)200mm
KRT-H-ZSD-1P208-6.0K-A	200-240V(AC 1φ)50/60 HZ	6.0kw	25-30A	(L)485mm(W)200mm(H)210mm
KRT-H-ZSD-3P280-6.0K-A	200-208V(AC 3φ)50/60 HZ	6.0kw	16-16.7A	(L)485mm(W)200mm(H)210mm
KRT-H-ZSD-3P380-6.0K-A	380-400V(AC 3φ)50/60 HZ	6.0kw	8.2-8.7A	(L)485mm(W)200mm(H)210mm
KRT-H-ZSD-3P208-9.0K-A	200-208V(AC 3φ)50/60 HZ	9.0kw	24-24.9A	(L)590mm(W)200mm(H)210mm
KRT-H-ZSD-3P380-9.0K-A	380-400V(AC 3φ)50/60 HZ	9.0kw	12.4-13A	(L)590mm(W)200mm(H)210mm